FIELD: application of thin polymeric coverings. SUBSTANCE: heater of the reactor is made in form of 2-4 turns of metal strap reeled upon the external surface of the reactor. The heater simultaneously serves inductor; it is connected to lower and high frequency sources through decoupling filters. Electron source is mounted inside the reactor. External or internal electrode may be installed in sublimation zone. The electrode is connected with voltage control. EFFECT: operative inertia-free control of sublimation speed. 2 cl, 1 dwg
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Authors
Dates
1994-04-30—Published
1991-11-19—Filed