DEVICE FOR FORMING POLY-P-XYLYLENE COATINGS Russian patent published in 1994 - IPC

Abstract RU 2011431 C1

FIELD: application of thin polymeric coverings. SUBSTANCE: heater of the reactor is made in form of 2-4 turns of metal strap reeled upon the external surface of the reactor. The heater simultaneously serves inductor; it is connected to lower and high frequency sources through decoupling filters. Electron source is mounted inside the reactor. External or internal electrode may be installed in sublimation zone. The electrode is connected with voltage control. EFFECT: operative inertia-free control of sublimation speed. 2 cl, 1 dwg

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RU 2 011 431 C1

Authors

Krasovskij A.M.

Tolstopjatov E.M.

Grakovich P.N.

Guryshev V.N.

Metkin N.P.

Lapin M.S.

Dates

1994-04-30Published

1991-11-19Filed