DEVICE FOR BONDING CRYSTALS TO BASE OF SEMICONDUCTORS Russian patent published in 1994 - IPC

Abstract RU 2016725 C1

FIELD: microelectronics. SUBSTANCE: device has air distribution mechanism comprising ejector with flow restrictor in feeding pipe and nozzle, and solenoid-operated valve. The valve has solenoid whose core is connected to conical gate of nozzle. By closing or opening the nozzle in central hole of tool it is possible to generate vacuum or excess pressure. EFFECT: enhanced efficiency of the device. 4 cl, 4 dwg

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RU 2 016 725 C1

Authors

Lebedev V.A.

Kalinin Ju.I.

Egorov A.V.

Dates

1994-07-30—Published

1991-02-25—Filed