HIGH-FREQUENCY PLASMA GENERATOR Russian patent published in 1995 - IPC

FIELD: plasma generation. SUBSTANCE: plasma generator has generator tube, such as triode with output capacitance not exceeding 7 pF whose anode is connected through matching inductance not exceeding 2-4 mcH and capacitance to discharge electrode and tube grid is connected via RC network to grounded cathode. Tube anode is connected in parallel with high-voltage d.c. source. RC network incorporates variable capacitor and resistor which can be adjusted between 100 pF and 4 mcF and between 1.5 kOhm and 10 MOhm, respectively. EFFECT: improved design.