FIELD: instruments. SUBSTANCE: device has capacitor-based differential pressure sensor with flexible diaphragm and two pneumatic inputs, converter of sensor capacitance to electric signal, and two monitoring units. In addition device has reference capacitor, two low-pass filters, differential amplifier, voltage clipper. This results in possibility generate signal for automatic compensation of pneumatic pressure to diaphragm of sensor due to electrostatic pressure to diaphragm caused by compensating voltage. Level of this voltage depends on measured value. Error in measuring is less than 1-2% EFFECT: increased precision. 2 dwg
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Authors
Dates
1995-08-27—Published
1992-07-20—Filed