PROJECTION LENS WITH MAGNIFICATION -1/10 99x Russian patent published in 1996 - IPC

FIELD: microelectronics. SUBSTANCE: invention may find use in projection exposing systems for manufacture of semiconductor devices. Projection lens has twelve components and diaphragm. First one of them is negative double-cemented lens, second one - negative meniscus, third fourth, fifth and sixth ones - positive lenses, seventh one - cemented positive meniscus, eighth one - cemented negative meniscus facing plane of objects with convexity, ninth one - double-cemented meniscus, tenth one - positive lens eleventh one - biconcave lens, twelfth one - positive meniscus facing plane of objects with convexity. EFFECT: expanded application field, improved operational characteristics. 3 dwg, 1 tbl