PROCEDURE OF EXAMINATION OF MICROOBJECTS Russian patent published in 2000 - IPC

FIELD: study and analysis of particles and materials with use of optical means in medicine, geophysics, mechanics, chemistry, powder metallurgy, environmental control. SUBSTANCE: examined microobjects are irradiated with radiation beam whose maximum linear volume of coherence in zone of irradiation of microobjects does not exceed 30% of mean distance between particles in space. Images of examined microobjects are formed by means of optical system and after reading their geometrical parameters are measured at level of signal dependent on illumination coherence and aperture angle of optical system forming images. EFFECT: enhanced measurement precision. 8 cl, 5 dwg