FIELD: physics.
SUBSTANCE: holographic interferometre has a radiation source with a collimator, an objective lens, an object under analysis, a photoplate and an intermediate optical medium placed between the photoplate and the object under analysis. The intermediate optical medium is in form of a periodic structure of projections and depressions, which can be made with period of 200-5000 mcm and ratio of the side of the projection to distance between the projections equal to 1:10.
EFFECT: higher accuracy of measuring deformations of the flat surface of solid-state electronics elements.
3 cl, 11 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| 0 |
|
SU1779914A1 | |
| METHOD OF INTERFERENCE DOUBLE-EXPLOSURE HOLOGRAPHY | 0 |
|
SU1120160A1 |
| DEVICE TESTING DEFORMATION OF SURFACE OF OBJECT | 1990 |
|
RU2097686C1 |
| METHOD OF DETERMINING DEFORMATION OF SOIL AND ROCKS | 0 |
|
SU777574A1 |
| MODE OF HOLOGRAM INTERFEROMETERING OF A FLAT OBJECT | 2003 |
|
RU2255308C1 |
| PULSED HOLOGRAPHIC APPARATUS | 0 |
|
SU1786370A1 |
| HOLOGRAPHIC INTERFEROMETER WITH PARALLEL LIGHT BEAMS | 0 |
|
SU1744443A1 |
| METHOD OF DETERMINING RESIDUAL STRESSES | 0 |
|
SU1758419A1 |
| METHOD OF FINDING DEFORMATIONS OF DIFFUSED REFLECTING OBJECTS | 2005 |
|
RU2289098C1 |
| HOLOGRAPHIC INTERFEROMETERS FOR CHECKING THE SHAPE OF HOLE INNER SURFACE | 0 |
|
SU1772617A1 |
