DEVICE FOR VACUUM STEAM TREATMENT Russian patent published in 2012 - IPC C23C14/24 

FIELD: machine building.

SUBSTANCE: device comprises a vacuum chamber (12), made as capable to maintain a preset pressure, a process vessel (2) and an evaporation vessel (3). Vessels (2) and (3) are installed so that they are isolated from the vacuum chamber and communicate with each other. A heating facility (6a, 6b) is made as capable to heat the process vessel and the evaporation vessel in that state, when in the process vessel there is a treated object (S), and in the evaporation vessel there is a metal evaporating material (V). The heating facility heats the process vessel and the evaporation vessel to cause evaporation of the metal evaporating material with simultaneous increase of the treated object temperature to the preset level, as a result the atoms of the evaporated metal move to the surface of the treated object located in the process vessel.

EFFECT: device has a simple design and is made as capable to control the number of atoms of the evaporated metal supplied to the treated object.

7 cl, 5 dwg, 1 ex