FIELD: process engineering.
SUBSTANCE: invention relates to gas flow cleaning. At least one gasiform admixture, for example, silane, is removed by absorption from incoming gas flow containing nitrogen and hydrogen. Said admixture features smaller volatility than that of incoming gas flow. Absorption is carried out by super cooled liquid absorbent at first cryogenic temperature and first pressure. Propane is a typical absorbent. Absorption can be performed in gas liquid contact column 130. Absorbent containing admixture can be regenerated in regeneration tanks 150 and returned to column 130.
EFFECT: possibility to remove gasiform admixture from gas flow of higher volatility than that of gas wherefrom it is to be removed.
13 cl, 3 dwg
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