FIELD: physics.
SUBSTANCE: invention relates to electronic engineering. An exit window unit of an electron beam (10) generating device comprises a supporting plate (22) and an electron exit window foil (20). The supporting plate (22) is configured to reduce creases in said foil (20). The foil (20) is fastened to the supporting plate (22) along a closed fastening line (26), which bounds a region in which the supporting plate (22) has a structure of openings and supporting parts for the foil, arranged in an alternating manner. When a vacuum is created in the housing (14), said structure is configured to form a topographic profile of the foil (20) which substantially absorbs any excess foil.
EFFECT: invention relates to a method of reducing creases in foil.
9 cl, 13 dwg
Authors
Dates
2015-09-27—Published
2011-02-01—Filed