FIELD: physics.
SUBSTANCE: sensor for measuring pressure or acceleration contains a housing; the first body moving along the sensitive axis, two pairs of second bodies arranged symmetrically about the first body along the sensitive axis; transducers for detecting the position of the first body relative to the body, communicating vibrations to the second bodies along the vibration axis, and detecting the frequency of oscillations of the second bodies; and surface electrostatic coupling means connecting each second body to the first body such that movement of the first body relative to the housing along the sensitive axis results in, respectively, strengthening or weakening of the electrostatic coupling for one and the other of the second body pairs.
EFFECT: improving the measurement accuracy.
8 cl, 2 dwg
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Authors
Dates
2017-10-03—Published
2014-10-21—Filed