METHOD OF MATERIAL SPRAYING SPEED CONTROL IN A GETTER PUMP AND A GETTER PUMP DEVICE Russian patent published in 2018 - IPC H01J7/00 

FIELD: devices for spraying liquids.

SUBSTANCE: invention relates to a method for controlling the rate of atomization of a material in a getter pump and a getter pump device. Automatic control of the spraying of getter material is provided depending on the current pressure in the chamber: the higher the pressure, the shorter the period of the ignition pulses. Depending on the operating mode selected by the operator (operating pressure value, start pressure value, state after reaching the operating pressure value: standby mode or complete shutdown) sputtering of getter material automatically at the signal from the control unit or stops, or is put on standby. Power of the ignition pulse is sufficient for arcing, but does not lead to premature failure of the ignition device insulator.

EFFECT: increase in the operational life of the getter pump by saving the atomized substance and increasing the operating time of the ignition device, as well as an increase in the temporary service life of the getter pump by increasing the time resource of the ignition device.

2 cl, 3 dwg