OPTOELECTRONIC MICROSCOPE Russian patent published in 2021 - IPC G02B21/00 G02B21/36 

FIELD: microscopy.

SUBSTANCE: microscope contains a television observation system with a matrix photodetector, an illumination system, a first lens, an electron-optical converter and a second lens. The first lens is made of two spherical mirrors, main one a concave and secondary a convex one, and its object surface is made in the form of a concave spherical surface facing the concavity towards the lens, and the photocathode of the image converter is aligned with the image plane. The second lens is optically coupled to the image converter screen and the matrix photodetector of the television channel and is made of two positive components. The object surface, the first lens, the image converter and the illumination system are enclosed in a vacuum volume. The ratios specified in the claims are fulfilled. EFFECT: ability to observe without the use of scanning precision mechanisms and provide a resolution value of less than 50 nm in the vacuum ultraviolet region of the spectrum at a design wavelength of ~ 30 nm.

1 cl, 3 dwg, 4 tbl