STANDARDLESS HIGHLY COHERENT INTERFEROMETER Russian patent published in 2021 - IPC G01B9/02 

Abstract RU 2760920 C1

FIELD: measuring equipment.

SUBSTANCE: invention relates to applied physics, in particular, to equipment for measuring aberrations and shapes of the surface of optical elements and systems. The interferometer comprises a power- and wavelength-stabilised He:Ne laser, a first fibre-optic light beam divider dividing a light beam into a first and a second coherent optical channels, a second fibre-optic light beam divider dividing a light beam into a second and a third coherent optical channels. One standard spherical wave source is connected to the output of each channel. The result achieved by the fact that interferometer comprises a standard spherical wave source generating a comparison wave, a source allowing for reflection testing of the part, as well as a source allowing for through-transmission testing of the part.

EFFECT: invention provides a possibility of testing the part without reconfiguring and moving the source of a standard spherical wave, the light whereof is directed to this part both in reflection and through-transmission mode.

1 cl, 1 dwg

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RU 2 760 920 C1

Authors

Toropov Mikhail Nikolaevich

Chkhalo Nikolaj Ivanovich

Salashchenko Nikolaj Nikolaevich

Malyshev Ilya Vyacheslavovich

Ulasevich Boris Aleksandrovich

Akhsakhalyan Anton Aramovich

Dates

2021-12-01Published

2021-06-03Filed