FIELD: measuring equipment.
SUBSTANCE: apparatus relates to the field of measuring equipment and can be used in automatic and automated measuring control systems. The apparatus comprises: a first, second and third division formation blocks; a first, second, third, fourth, fifth, sixth, seventh, eighth, ninth and tenth multiplication formation blocks; a first, second, third, fourth, fifth and sixth difference formation blocks; a first and a second sum formation blocks; a first inversion formation block. In the apparatus for identifying the parameters of transient response of a MEMS accelerometer, an algorithm for multiparametre variational identification of dynamic systems for real models of MEMS accelerometers described by second-order differential equations is implemented, allowing for estimation of the parameters of transient response thereof.
EFFECT: increase in the accuracy of estimation of the parameters of a model of a MEMS accelerometer.
1 cl, 1 dwg
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Authors
Dates
2022-03-16—Published
2021-02-19—Filed