PULSE SYSTEM FOR ELECTRON-BEAM MICROPROBE DEVICES Russian patent published in 1994 - IPC

Abstract RU 2019885 C1

FIELD: electron- and ion-beam microprobe systems. SUBSTANCE: system has electron gun 1, the first capacitor 2, the second capacitor 3, strobe-system 4, limiting diaphragm 5, objective lens 6, raster system 7, deflection quadrupole systems 8, additional deflecting electro-mechanical element 9, corresponding couplings. EFFECT: improved precision; improved efficiency. 4 cl, 1 dwg

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RU 2 019 885 C1

Authors

Rybalko V.V.

Dates

1994-09-15—Published

1991-03-25—Filed