NANO-RESOLUTION X-RAY MICROSCOPE Russian patent published in 2012 - IPC G21K7/00 G01N23/04 

FIELD: physics.

SUBSTANCE: nano-resolution x-ray microscope on a tube assembly has an electron gun with an electron lens system, deflecting systems, a target made from a thin metal layer on an X-ray transparent base, a coordinate-sensitive X-ray detector, wherein the objective lens further includes an isolated electrode across which a positive drawing potential is applied, and in the space between the last two lenses there is a secondary electron detector consisting of a deflecting grid, a scintillator and a photomultiplier.

EFFECT: high resolution of the X-ray microscope, high efficiency, and further possibility of analysing objects in secondary and reflected electrons with high resolution.

1 dwg