LOCK FOR INTRODUCING MATERIALS INTO VACUUM CHAMBER Russian patent published in 1994 - IPC

Abstract RU 2023747 C1

FIELD: mechanical engineering; sphere of application of coatings in vacuum. SUBSTANCE: object of this invention is batching of materials to be fed into vacuum chamber. This object is attained by positioning rod and piston, which is heremetically sealed together with rotor by sylphon bellows, into each seat. Piston interacts with cone which is rigidly secured to end face of screw fitted into cone threaded opening. EFFECT: more sophisticated design. 2 dwg

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RU 2 023 747 C1

Authors

Ivashov E.N.

Lerner L.I.

Parshikov A.P.

Stepanchikov S.V.

Tsvetkov P.A.

Dates

1994-11-30Published

1991-04-11Filed