FIELD: mechanical engineering; sphere of application of coatings in vacuum. SUBSTANCE: object of this invention is batching of materials to be fed into vacuum chamber. This object is attained by positioning rod and piston, which is heremetically sealed together with rotor by sylphon bellows, into each seat. Piston interacts with cone which is rigidly secured to end face of screw fitted into cone threaded opening. EFFECT: more sophisticated design. 2 dwg
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Authors
Dates
1994-11-30—Published
1991-04-11—Filed