HIGH-FREQUENCY CAPACITIVE PLASMA GENERATOR Russian patent published in 1995 - IPC

FIELD: electric discharges in gases. SUBSTANCE: plasma generator has dielectric gas discharge chamber-tube, set of conducting cooled electrodes which embrace the tube and are connected to high-frequency voltage source, system for feeding and removing gas away from the chamber. Gas discharge chamber-tube is made in form of two sections disposed in align and at a spaced relation in such a manner, that free technological space is formed which permits to get positive column of the discharge. This space is used simultaneously for exit of plasma-forming gas. Optimal relation of space 1 to diameter d of the tube is within 0.10-0.25 range. High-frequency device has two conducting cylindrical electrodes which are cooled by running water and which embrace the chamber-tube. EFFECT: widened technological capabilities of plasma generator. 4 cl, 2 dwg