FIELD: instrument engineering. SUBSTANCE: micromanipulator has movable carriage 1, piezoelectric drive made in form of shaft with rotor 6, which is connected with annular piezoelectric elements 7 and 8 through pushers. One piezoelectric element is mounted onto the shaft, and the other one onto the case. Manipulator also has control system which has high-frequency pulse generator 10, controlled switch 11, excitation pulse frequency former 13 and excitation pulse duration former 14, power source 12. EFFECT: improved precision. 2 dwg
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Authors
Dates
1995-08-09—Published
1992-04-22—Filed