GEAR FOR ATTACHMENT OF ARTICLES, MAINLY SEMICONDUCTOR PLATES, IN PLANTS FOR THEIR DIVISION INTO CRYSTALS Russian patent published in 1995 - IPC

Abstract RU 2047934 C1

FIELD: electronics. SUBSTANCE: invention is meant for fixation of plates of semiconductor material for working and division into separate crystals. Mechanism 2 for attachment of polymer film material 3, support 4 with holes 5, piezoelements 13 and 14 are coupled to case 1 of electroadhesive attachment gear. Pushers 6 coupled to rod 16 interacting with piezoelement 13 pass through holes 5 and 23 made in cross-piece 22. Pushers 7 coupled to cross-piece 22 which interacts with piezoelement 14 via rod 17 also pass through holes 5. EFFECT: improved operational characteristics enhanced productivity and operational reliability. 2 cl, 11 dwg

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RU 2 047 934 C1

Authors

Abrarov Vagiz Nurgalievich

Nikolaev Jurij L'Vovich

Dates

1995-11-10—Published

1991-07-11—Filed