DEVICE FOR DOPING PART SURFACE WITH ION BEAM Russian patent published in 1996 - IPC

FIELD: electronic devices. SUBSTANCE: device has two sets of relatively perpendicular plates affording deflection of ion beam. Varying potential difference is applied to each set from two identical control units. Each control unit has reversing pulse counter, read-only memory, two digital-to-analog converters, and output amplifier with paraphase outputs connected to deflecting plates. Read-only memory and first digital-to-analog converter are connected to counter, second digital-to-analog converter, to code outputs of read-only memory, and amplifier, to first digital-to analog converter. First control unit counter is supplied with pulses from generator and second control unit counter, with carry pulse generated at the moment of count reversal in first control unit counter. Signals from second digital-to-analog converters of both control units are passed through analog-signal adder and function to control pulse repetition period of generator. EFFECT: improved design. 2 dwg