REMOTE-CONTROL ELECTRO-OPTICAL INSTRUMENT FOR VERY HIGH-SPEED TESTERS OF INTEGRAL CIRCUITS Russian patent published in 1996 - IPC

FIELD: optical instruments. SUBSTANCE: device has plate of electro-optical material with metal areas on its surface, testing pulse laser with device for polarization control, scanning optical system, which is located between plate and laser, two-channel analyzer, which is located on way of beam reflected from metal area, as well as receiving-amplifying system with photodetectors which are located in both channels of analyzer. Photodetectors are designed as lines of detecting gates. Each channel of analyzer has deflector with synchronization unit, which are inserted between analyzer and line of detecting gates. Input of synchronization unit is connected to pulse laser, while its outputs are connected to deflectors and focusing optical system, which is located between deflector and line of detecting gates. EFFECT: functional and dynamic test of high- speed integral circuits. 3 cl, 4 dwg