PROCESS OF MANUFACTURE OF DIFFRACTION OPTICAL ELEMENT Russian patent published in 1997 - IPC

FIELD: optics, inspection of parameters of microrelief of diffraction optical element immediately in process of its manufacture. SUBSTANCE: in agreement with proposed process of manufacture of diffraction optical element formation of specified periodic relief-phase structure is carried out its working layer simultaneously with measurement of intensity of diffracted beams and moment of finish of formation of structure is determined by results of measurement. Finish of formation of structure is determined by relation of intensities of not less than two chosen orders of diffraction of non-actinic probing beam obtained by calculation or experiment with allowance for difference between circuit of its control from circuit where it will be used. EFFECT: facilitated manufacture. 2 dwg