PROCESS OF MANUFACTURE OF INTERFERENCE LAYER Russian patent published in 1997 - IPC

Abstract RU 2087014 C1

FIELD: manufacture of IR interference coats of various functional assignment. SUBSTANCE: after evaporation from crucible evaporated material contains tellurium in the amount of 55.0-58.0 atomic per cent, germanium being the balance. Evaporation is performed by electron beam at condensation rate not less than 7 nm/s. EFFECT: enhanced efficiency of process.

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RU 2 087 014 C1

Authors

Glebov V.N.

Maljutin A.M.

Golota A.F.

Krivosheev N.V.

Dates

1997-08-10Published

1993-04-27Filed