FIELD: methods of removal of residual admixtures from chambers. SUBSTANCE: liquid phase of admixture is crystallized in course of evacuation at constant rate of evacuation; process requires lesser time! rate is determined by the following formula: 
. This rate of evacuation is optimal. In case rate of evacuation is more or lesser than optimal value, time required for removal of residual admixture is increased. EFFECT: enhanced efficiency. 1 dwg
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