LASER PROJECTION MICROSCOPE Russian patent published in 2001 - IPC

FIELD: quantum electronics, laser projection systems. SUBSTANCE: laser projection microscope can be used for non-destructive test of large integrated circuits, for inspection of processes of treatment of materials with concentrated energy fluxes in industry, for examination of microobjects in medicine and biology. It has laser amplifier, objective lens, TV camera matched with computer placed coaxially. Image of observed object is formed on receiving unit of camera with the use of image forming system. Image forming system can include three lenses. First and second lenses are rigidly fixed relative each other so that rear focus of first lens is matched to front focus of second lens, third lens is made fast with regard to receiving unit of image recording system. Distance l₁ from observed object to first lens is chosen from condition l₁>(f₁+f₂)×f₁/f₂, where f₁ and f₂ are focal distances of first and second lenses accordingly. With movement of observed object along optical axis image of object of observation is displaced after second lens and distance from it to third lens changes. By movement of system of first and second lenses with reference to third lens this distance is brought to initial state, that is size of image of observed object on receiving unit of TV camera is also brought to initial position. Required displacement of system of first and second lenses is strictly proportional to displacement of object of observation with proportionality factor K = (f₂/f₁)/(1-(f₂/f₁)). EFFECT: preservation of stable size of image of observed object on receiving unit with change of its position along optical axis and consequently increased accuracy of test. 2 dwg