FIELD: measurements of accuracy of surface form; methods and devices for check of deviations from flatness. SUBSTANCE: method consists in placing the surface under test in parallel with surface plate and rotating the meter around first axis; center of ellipse is aligned with center of symmetry of surface under test; axes of ellipse are selected to be equal to at least 0.9 of respective length and width of surface under test. Device for check of deviations from flatness includes mechanism for rotation of meter made in form of chuck suspended from housing. Device is provided with ellipse mechanism, meter radial motion mechanism and meter radial motion control mechanism. EFFECT: enhanced accuracy; facilitated procedure of measurements. 3 cl, 4 dwg
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Authors
Dates
2001-05-27—Published
1998-12-15—Filed