METHOD OF DYNAMIC CALIBRATION OF VACUUM GAUGE Russian patent published in 2002 - IPC

FIELD: instrumentation. SUBSTANCE: measurements are conducted in space of measurement chamber placed in parallel with calibration chamber and limited on two sides by diaphragms of low conductivity. Joint recording of readings of calibrated and reference vacuum gages is carried with supply of metered quantity of test gas into spaces of both chambers. In process of increase of pressure in chambers and its subsequent decrease due to natural loss of portion time intervals corresponding to two any equal readings related to each vacuum gauge are measured and values of pressure used to compare readings of calibrated vacuum gauge are computed by known dependencies. EFFECT: expanded calibration range of vacuum gauges to high and superhigh vacuum, increased calibration precision. 1 dwg