DEVICE FOR DETERMINATION OF VOLUMES OF CLOSED CAVITIES Russian patent published in 2019 - IPC G01F17/00 G01F23/00 G01F1/00 G01L27/00 G01L23/00 

FIELD: measuring equipment.

SUBSTANCE: device relates to measuring equipment, in particular, to measuring the capacities of closed sealed volumes in various complex systems and installations related to vacuum technology, with the possibility of placing inside their volumes porous materials and / or structural elements of them. In the device for determining cavities of closed volumes, containing measuring and calibrated volumes, two manometers, measuring and calibrated volumes are interconnected through one or more auxiliary volumes, all of which are sealed rigid structures, high-vacuum control valves are installed in front of the measuring and calibrated volumes; exemplary absolute gauge pressure gauges are used as pressure gauges with a measurement range in the region of relatively low and relatively high pressure; the measuring volume is a cylindrical composite cavity formed from two vacuum joints, in which a split collet with a miniature gas-filled device having a surface made of microporous material is located on one side, and on the other hand, there is a displacer of volume in the form of a cylindrical rod of variable diameter with an axial through hole mated by one of its ends with the collet through the groove-undercut, and the second end face of the controlled ultrahigh-vacuum pneumatically actuated valve located opposite the end of the valve; the calibrated volume is a micro-cavity formed from voids based on the design of a high-vacuum angular control valve, one of the joints of which from the side of the sealing pair “valve-saddle” is plugged with an all-metal flange having a cylindrical protrusion along the axis of rotation with a diameter close to the internal diameter of the surface covering it, acting as a free volume propellant; contains a pumping system that includes high vacuum and forevacuum pumps, control valves, a wide-range pressure gauge converter, a low vacuum sensor and a gas metering device that is connected to the gas supply system.

EFFECT: technical result is to increase the accuracy and reliability in determining the volumes of closed cavities, especially for assessing the capacities of relatively small quantities of arbitrary shape that are part of complex vacuum systems and installations that have relatively narrow passageways and, in particular, porous materials and / or structural elements of them.

3 cl, 4 dwg, 2 tbl