CAPACITANCE-TYPE PRESSURE DIFFERENTIAL SENSOR Russian patent published in 2004 - IPC

FIELD: measurement technology; measurement of pressure in monitoring and control systems.

SUBSTANCE: proposed capacitance-type pressure differential sensor has housing with pipe unions for delivery of one pressure inside housing and above-membrane space and membrane arranged inside housing and secured by means of cover; cover is provided with pipe union for delivery of other pressure. Sensor includes capacitance transducer with one movable and two immovable electrodes. Mechanical linkage between membrane and movable electrode is effected of capacitance transducer is effected by means of rod and sectional bellows located coaxially relative to rod and membrane on side of action of pressure being measured isolating the cavity of capacitance transducer from action of this pressure. Lower base of sectional bellows is connected with housing through bush on one side and with upper base of bellows on other side; bush has ports and upper base of bellows is welded to this bush. Upper part of bellows is connected with flat disk carrying the rod which is connected with movable electrode. Projections of disk passed through ports in bush are connected with flat center of membrane by means of perforated adapter bush.

EFFECT: linearity of characteristic; enhanced vibration and impact resistance of sensor.

1 dwg