FIELD: optics, electronics.
SUBSTANCE: method includes scanning analyzed mono-crystal relatively to light beam, and for synchronous determination of moment of compensation of phases difference modulating and scaling of electrical signal is performed with following electronic and mathematical treatment with use of block for electronic control and software. Plant for realization of method includes radiation source, optical-electrical system, scanning drive, electronic control block, analog-digital converter, personal computer. Information concerning presence, value and character of distribution of voltages in analyzed mono-crystal is displayed on monitor in form of two or three-dimensional image.
EFFECT: higher productiveness, simplified process, higher trustworthiness.
2 cl, 2 dwg
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Authors
Dates
2004-11-20—Published
2002-10-17—Filed