AN INTERFEROMETER FOR CONTROLLING OF THE FORM OF PROMINENT, CONCAVE SPHERICAL AND FLAT SURFACES OF LARGE-SIZED OPTICAL COMPONENTS Russian patent published in 2005 - IPC

FIELD: measuring instruments.

SUBSTANCE: the interferometer for controlling of the form of prominent, concave spherical and flat surfaces of large-sized optical components has a source of monochromatic radiation, a collimator and an objective, one after another located a beam divider, a flat mirror and an aplanatic meniscus with a reference surface and also an observation branch located behind the beam divider in beam return and a working branch consisting out of a spherical mirror with a compensator which form a focusing system. Depending of the form of a controlled surface focusing of the working branch of the interferometer is executed at replacing the compensator and the basic block of the interferometer which has an illuminating branch. A beam divider, a flat mirror, an aplanatic meniscus and an observation branch relative to a fully stabilized spherical mirror along an optical axis on such a distance at which the beams reflected from the spherical mirror fall on the controlled surface transversely to its surface.

EFFECT: expansion of nomenclature of controlled surfaces, decreasing large-sized dimensions of the interferometer.

2 cl, 3 dwg