METHOD OF SPECKLE INTERFEROMETRY OF FLAT OBJECT Russian patent published in 2005 - IPC

FIELD: optical engineering.

SUBSTANCE: flat object is illuminated with coherent radiation to measure movement at the plane and angle of inclination of flat part of surface. Radiation dissipated by object is directed to optical system, which carries out integral optical transformation of wave field. Two inverse Fourier-Frenel transforms are used on the base of collecting lens. Intermediate and final results are fixed onto photographic plates, which form specklegram and interferogram. Object and photographic plate are disposed at different varying distances from lens. Values to be measured are divided and required sensitivities of measurement are found, which depend on focal length f of first lens, parameters of first optical inverse Fourier-Frenel transform φ, δ and on focal length f second lens and parameter α of second optical inverse Fourier-Frenel transform.

EFFECT: varying sensitivity; widened range of measurement of shift and inclination.

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