TWO-STAGE MEMBRANE PUMP (VERSIONS) Russian patent published in 2006 - IPC F04B43/04 

FIELD: vacuum engineering; evacuation of air or process gases; hydraulic and pneumatic systems for transfer of liquid or gaseous media.

SUBSTANCE: proposed pump has hollow housing consisting of inlet and outlet parts with membrane placed in between them by its peripheral part. In center of membrane there is at least one hole closed by intermediate valve secured on central part of membrane. On side of inlet part of pump housing electromagnetic inlet valve is mounted and on side of outlet part electromagnetic outlet valve is mounted. Intermediate valve is used as armature of electromagnetic drives; it moves together with central part of membrane inside housing and opens and closes under action of said electromagnetic drives. According to another version outlet valve drive is absent. In this case outlet valve performs function of check valve.

EFFECT: increased rate of evacuation; possibility of creating high vacuum at inconsiderable technological expenses.

15 cl, 5 dwg