FIELD: vacuum equipment.
SUBSTANCE: invention relates to valves designed for cutting off gas flows on medium boundary at pressure from 2-3 atm to medium vacuum and medium with pressure from atmosphere to medium vacuum (10-5-10-6Pa). Valve contains seat with hole or holes, over which diaphragm is secured by center part made either with of without clicking, normally open or normally closed. Valve is set into action by linear electric motor consisting of winding and armature which can be installed either stationary or movably. Valve can be set into operation by external drive from other electromagnetic device.
EFFECT: reduced energy consumption, contamination of process medium with electromagnetic field, improved reliability and increased service life of valve of valves, simple and compact design of valves.
21 cl
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Authors
Dates
2006-04-27—Published
2004-07-05—Filed