FIELD: measuring technique.
SUBSTANCE: mass flow meter comprises semiconducting chip made of SiC or silicium, or thin wolfram film placed on the substrate. The pickups could be arranged symmetrically with respect to the pipeline and connected in a bridge circuit. The fluid is heated by the pickups when current is supplied to the bridge circuit from the electronic circuit. The output signal of the electronic circuit could be used for control of the fluid flow by means of a control valve.
EFFECT: enhanced accuracy of measurements and simplified structure.
8 cl, 11 dwg
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