ACTIVE CONTROL X-RAY SURFACE ANALYZER Russian patent published in 2007 - IPC G01B15/08 

FIELD: inspection of relief formation of surface layer during abrasive processing.

SUBSTANCE: active control X-ray surface analyzer has X-ray radiation source. Beam from X-ray radiation source goes through optical resonator to get monochromatic X-ray radiation. After that the beam is directed onto crystal mirror by means of which mirror two beams are produced - object and reference ones. Reference beam is directed by diffraction optics system of elements, which are crystal mirror and collimator, to registering medium. Object beam after having passed collimator through enters moving object, passes through collimator, reflecting X-ray microscope, which microscope magnifies three-dimensional interference pattern when registering holographic image of tested object, enters crystal-analyzer. Due to interference of object and reference beams behind collimator the holographic, changing in time image of moving object can be produced. Collimator, through which the object beam passes to reach moving object, is based upon eight-beam diffraction. Microscopic geometry of tested object is visualized by means of three-dimensional array.

EFFECT: inspection of formation of microscopic relief during abrasive processing; study of mechanisms of processes induced by formation of microscopic relief.

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