FIELD: coordinate finding.
SUBSTANCE: method of finding coordinates is based upon projecting image onto surface of object through massif of microscopic lenses and massif of point images is formed onto surface of object. Any point image is registered by array photoreceiver; image is transformed into electric signal and then to discrete signal. Discrete signal is digitized in several points and envelope of signal is formed. Then position and value of maximum of envelope of signal is found. Derivatives of signal are found in points where signal had been digitized and mismatch of relative reference signal is formed in points where signal had been digitized. Mismatches are processed by Kalman filter and coordinates of point image are determined.
EFFECT: improved precision of measurement.
5 dwg
