FIELD: metallurgy, crystal-growing process.
SUBSTANCE: invention refers to the mechanism for rotation and motion in the devices for growing of semiconducting material monocrystals by method of Chochralsky. The gearing of rotational and motional of growing monocrystal in the devices of its growing contains the roundabout in the hull, making into movement through cog-wheel and transmission shaft of the engine of monocrystal rotation, and also installed inside of the roundabout drum, mad into motion by engine of monocristal motion, which is installed on the nonmovable hull with possibility of transmitting of rotation to the drum through installed in the hull differential. So it is realized the using of commutatorless gearing due to the installed differential mechanism, which allows to transmit the rotation from the fixed engine to the drum by string, rotating with the roundabout around vertical axis, at the same the speed of lifting or dropping of monocrystal doesn't depend on the speed of rotation of the roundabout and regulated just by the speed of rotation of engine of monocrystal motion. The invention increase the reliability of the gearing functioning due to the possibility of application of modern servicing motor, providing the high-quality programmed moving and rotation of monocrystal, and also let to decrease the vertical sizes of the gearing due to fixing of the engine of crystal motion on the hull of the gearing and reservoir absence with brushers, that cause the decreasing of dynamic deregulation.
EFFECT: perfectioning of the mechanism for rotation and motion in the devices for growing of semiconducting material monocrystals by method of Chochralsky.
1 dwg
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Authors
Dates
2008-05-20—Published
2006-04-28—Filed