METHOD FOR CONTACTLESS MEASUREMENT OF SURFACE ROUGHNESS PARAMETRES Russian patent published in 2010 - IPC G01B11/00 

Abstract RU 2380655 C1

FIELD: physics.

SUBSTANCE: maximum dimension L of a spot on the measured surface is given. A beam of probe radiation is directed on the spot. The spot is formed and characteristics of the reflected radiation are measured, from which the mean-square value of roughness Rq is determined. Also dimension x of the spot on the measured surface ranging from 0 to L is measured. Dependence function Rq(x) and its derivative Rq'x(x) are determined. Arithmetic average surface roughness Ra is determined using formula:

EFFECT: wider functional capabilities due to simultaneous contactless measurement of roughness parametres Rq and Ra.

1 dwg

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RU 2 380 655 C1

Authors

Mironchenko Vladimir Il'Ich

Dates

2010-01-27Published

2008-10-03Filed