METHOD AND DEVICE FOR EVALUATING PARAMETERS OF SPATIAL POSITION AND ROUGHNESS OF PART SURFACE Russian patent published in 2004 - IPC

FIELD: measurement and fiber-optic technologies. SUBSTANCE: proposed method and device that can be used in instrumentation engineering, engineering tooling, and mechanical engineering for contactless high-precision measurements of linear (position 1, displacement Δ1) and angular (inclination γ, displacement Δγ) parameters of spatial position and roughness of part surfaces depends on use of fiber-optic transducer that has input and output optical fibers, lens, and diffraction grating, generation of set of diffraction orders along two or more axes with aid of diffraction grating, illumination of part surface by means of them, and transfer of diffraction orders reflected from part surface by output optical fibers for photo-conversion. Axial and angular displacements of object surface cause various changes in output signals being generated and their analysis enables detection of type and degree of these displacements. Set of output signals makes it possible to obtain conversion function with different range parameters and to reduce random components of measurement error. Radiator wavelength tuning causing changes in diffraction angles results in scanning of part surface (its probing) by diffraction order beams enabling in the end evaluation of spatial distribution of diffusion and mirror components of dissipation indicatrix incorporating data on part surface roughness parameters. EFFECT: enhanced precision of measurements. 5 cl, 5 dwg