FIELD: technological processes.
SUBSTANCE: invention relates to equipment for welding with heating, in particular to installations for diffusion welding of semiconductors with dielectrics and may be used in radio engineering, electronic and instrument-making industry. Installation comprises heating chamber (1), heaters (2), current-conducting busbars (3), insulators (4) and packet device, which consists of system for compression of units-billets (5), lower (8) and upper (9) current-conducting plates. Bimetallic plate (11) is fixed in heating chamber (1) and is arranged from materials with various temperature coefficients of linear expansion. One end of metal insert (10) is connected to bimetallic plate (11), and its other end is installed between units-billets (5).
EFFECT: invention is aimed at improvement of quality of connected parts due to provision of required extent of vacuum.
2 dwg
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Authors
Dates
2010-08-20—Published
2009-09-11—Filed