METHOD OF CONTROLLING SURFACE ROUGHNESS BASED ON REFLECTED GIGANTIC SECOND HARMONIC GENERATION EFFECT Russian patent published in 2011 - IPC G01B11/30 

FIELD: physics.

SUBSTANCE: surface is probed with laser radiation and intensity of generation of the reflected gigantic second harmonic is recorded using photosensitive devices. The rough surface is covered by a layer of nanoparticles. The detected information feature used is generation of the reflected gigantic second harmonic induced by the probing laser radiation. Surface roughness is controlled based on variation of intensity of the reflected gigantic second harmonic with variation of the angle between the axis of the probing radiation and the normal to the rough surface. When controlling roughness, roughness characteristics can be determined from known dimensions of the nanoparticles. The material of the nanoparticles can be a semiconductor, for example silicon or metal, for example silver. The method enables to control local areas of a surface as well as the entire surface by scanning its local areas.

EFFECT: high accuracy of integral estimation of roughness and local estimation of the desired area of the surface.

6 cl, 4 dwg