THERMAL-CONDUCTIVITY VACUUM GAUGE Russian patent published in 2011 - IPC G01L21/22 

FIELD: electricity.

SUBSTANCE: thermal-conductivity vacuum gauge includes analogue-to-digital converter, analogue commutator, microprocessor, digital indication and interface devices; at that, two thermal resistors heated with electric current are placed into vacuum chamber, each of which is connected to one of two individual bridge circuits; one branch of each bridge circuit consists of in-series connected thermal resistor and reference resistor corresponding to it, and the second branch is formed of pair of constant resistors; one operational amplifier the inputs of which are connected to measuring diagonal of the appropriate bridge circuit and output is connected to diagonal of its power supply is introduced in addition to each of bridge circuits so that change of supply voltage of bridge circuit, which is caused by its imbalance, can lead to its balancing owing to changing the current of warming of thermal resistor; at that, input of analogue-to-digital converter is connected in turn by means of commutator to reference resistor of each bridge circuit.

EFFECT: sufficient improvement of quick action of vacuum gauge.

1 dwg