FIELD: physics.
SUBSTANCE: dissipation power of a heated thermistor is measured at two different fixed temperatures of the thermistor which exceed the maximum possible temperature of the surrounding gas and the measurement results are used to calculate the differential thermal scattering coefficient which is independent of temperature of the surrounding gas, from the value of which the measured pressure value is determined. The vacuum gauge has a thermistor, a measuring bridge, a model fixed resistor, auxiliary fixed resistors, an analogue switch and an operational amplifier. The vacuum gauge also has an analogue-to-digital converter, a microprocessor, a digital indicator device and an interface device.
EFFECT: complete elimination of effect of fluctuation of temperature of the surrounding gas on vacuum gauge readings.
2 cl, 1 dwg
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