METHOD FOR OBTAINING TEMPERATURE CONTROL COATING IN VACUUM Russian patent published in 2012 - IPC C23C14/24 

Abstract RU 2440440 C1

FIELD: metallurgy.

SUBSTANCE: method involves application to the item of reflecting metal layer and further deposition on it of protective film. Protective film is deposited from gaseous phase obtained from mixture of vapours of organic silicon compound of hexamethyl disilosane (HMDS) and air at ratio of 1:2 in plasma of glow discharge at partial pressure of HMDS of 13.3-26.6 Pa and partial air pressure of 39.9-53.2 Pa.

EFFECT: obtaining qualitative temperature control coating with increased adhesion strength and wear resistance.

2 ex, 1 tbl

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Authors

Astakhov Jurij Pavlovich

Savel'Ev Aleksandr Aleksandrovich

Merkulova Valentina Petrovna

Zheleznyj Aleksej Germanovich

Kachalin Sergej Vladimirovich

Loktev Daniil Alekseevich

Dates

2012-01-20Published

2010-05-26Filed