FIELD: nanotechnology.
SUBSTANCE: invention relates to the field of nano-and microsystem equipment and polymer nanocomposites and can be used to create the elements of nanoelectronics with adjustable resistance, protective and heat-removing film coating. The method of manufacturing a film consisting of a polymer matrix reinforced with a vertically oriented array of carbon nanotubes grown on a substrate includes dissolving of the polymer in a solvent to a viscosity that enables the solution to flow between the nanotubes, the formation on the substrate of the nanocomposite layer from the polymer solution by centrifugation, and the substrate is placed perpendicular to the plane of the centrifuge rotation, and heat treatment at a temperature no higher than the temperature of destruction of the polymer matrix, and the carbon nanotubes on the substrate are grown vertically to its surface with adjustment of density of the array of nanotubes.
EFFECT: method enables to eliminate adhesiveness of nanotubes and increase degree of their orientation in the volume of the polymer matrix to create resistive elements of different value, interconnections and dielectric sites in one technological cycle of technology that is compatible with the technology of microelectronics.
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Authors
Dates
2013-04-10—Published
2011-05-10—Filed