MANUFACTURING METHOD OF PIEZOELECTRIC PRESSURE SENSOR Russian patent published in 2013 - IPC G01L9/08 

FIELD: measurement equipment.

SUBSTANCE: base is provided with at least two piezoelectric elements pressed with the housing with a membrane that is made with rigid centre; the housing is tightly connected to the base; after that, the membrane is leaded with excess pressure, the value of which is more than upper limit of the measured range to plastic deformation of the membrane part located between its rigid centre and outer diameter; at that, ratio of the diameter of the rigid centre to diameter of the membrane is chosen from the range that is more than 0.65, but less than 1.

EFFECT: increasing sensitivity of manufactured pressure sensors and linearity of their characteristic owing to reducing parasitic rigidity.

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