METHOD OF DETERMINING CONCENTRATION OF IMPURITIES IN MONOCRYSTAL Russian patent published in 2015 - IPC G01N23/20 

FIELD: physics.

SUBSTANCE: method comprises, in a neutron backscattering spectrometer, varying the temperature of a reference crystal until the interplanar distance of the reference crystal matches the interplanar distance of the analysed crystal, and calculating the relative change of the interplanar distance of the analysed crystal at said point. Measurement of the interplanar distance of the analysed crystal relative to the reference crystal is carried out at multiple "m" points. The method comprises, at all measured points of the analysed crystal, calculating the average value of the interplanar distance of the analysed crystal, determining change in spatial distribution of concentration of impurities for each point of the analysed crystal relative to the obtained average value.

EFFECT: obtaining a multi-dimensional distribution pattern of impurities.

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